Cyclone separation, pre-filtration and fine filtration are integrated into a three-stage purification system. The oil in the Compressed air is directly cut off. Through cyclone separation, gravity settlement, coarse filter core and fine filter core layer filtration, oil, water and dust in the Compressed air are completely removed, the filter precision of the treated Compressed air is 0.1 um and the residual oil is less than 0.01 PPM. Capccity:1~500Nm3/min Operationg pressure:0.4~1.0MPa(can provide1.0-3.0MPa) Inlet air Temperature:≤50℃(Min5℃) Oil content:≤0.1~0.01ppm Vapor-liquid separation efficiency:≥98% Pressure Loss:≤0.02MPa ambient temperature:≤45℃ Service life:≥8000H